Handbook of Ion Beam Processing Technology - Principles, Deposition, Film Modification and Synthesis
- Author
- Cuomo, Jerome J.Rossnagel, Stephen M.Kaufman, Harold R.(eds.)
- Publisher
- William Andrew Publishing/Noyes
- Language
- English
- Year
- 1989
- Page
- 446
- ISBN
- 978-0-8155-1757-3,978-0-8155-1199-1
- File Type
- pdf
- File Size
- 23.1 MiB
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