Handbook of Thin Film Deposition Processes and Techniques. Principles, Methods, Equipment and Applicatios
- Author
- Krisna Seshan (Eds.)
- Publisher
- Elsevier
- Language
- English
- Year
- 2001
- Page
- 629
- ISBN
- 978-0-8155-1442-8
- File Type
- pdf
- File Size
- 12.8 MiB
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