Novel Optical Technologies for Nanofabrication
- Author
- Qian Liu, Xuanming Duan, Changsi Peng (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2014
- Page
- 267
- ISBN
- 978-3-642-40386-6,978-3-642-40387-3
- File Type
- pdf
- File Size
- 12.5 MiB
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