Adhesion Aspects in MEMS/NEMS
- Author
- S H KimM T DuggerK L Mittal
- Publisher
- CRC Press
- Language
- English
- Year
- 2011
- Page
- 424 p.
- ISBN
- 9789004190955,9004190953
- File Type
- pdf
- File Size
- 15.8 MiB
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