Handbook of Silicon Based MEMS Materials & Technologies
- Author
- Lindroos V., Tilli M., Lehto A., Motooka T.
- Publisher
- William Andrew
- Language
- English
- Year
- 2010
- Page
- 636
- ISBN
- 0815515944,9780815515944
- File Type
- pdf
- File Size
- 14.5 MiB
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