Poly-SiGe for MEMS-above-CMOS Sensors
- Author
- Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw (auth.)
- Publisher
- Springer Netherlands
- Language
- English
- Edition
- 1
- Year
- 2014
- Page
- 199
- ISBN
- 978-94-007-6798-0,978-94-007-6799-7
- File Type
- pdf
- File Size
- 6.8 MiB
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