Poly-SiGe for MEMS-above-CMOS Sensors

Author
Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw (auth.)
Publisher
Springer Netherlands
Language
English
Edition
1
Year
2014
Page
199
ISBN
978-94-007-6798-0,978-94-007-6799-7
File Type
pdf
File Size
6.8 MiB

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