PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing
- Author
- Ronald A. Powell and Stephen M. Rossnagel (Eds.)
- Publisher
- Academic Press, Elsevier
- Year
- 1999
- Page
- 1-419
- ISBN
- 978-0-12-533026-8
- File Type
- pdf
- File Size
- 24.1 MiB
How to Download?!!!
Just click on START button on Telegram Bot