Force Sensors for Microelectronic Packaging Applications (Microtechnology and MEMS)
- Author
- Jurg Schwizer, Michael Mayer, Oliver Brand
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 184
- ISBN
- 3540221875,9783540269458,9783540221876
- File Type
- pdf
- File Size
- 11.6 MiB
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