C,H,N and O in Si and Characterization and Simulation of Materials and Processes
- Author
- A. Borghesi, U.M. Gösele, J. Vanhellemont, A.M. Gué and M. Djafari-Rouhani (Eds.)
- Publisher
- Elsevier
- Language
- English
- Year
- 1996
- Page
- 564
- ISBN
- 978-0-444-82413-4,9780444596338,044459633X
- File Type
- pdf
- File Size
- 135.6 MiB
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