Thin Film Materials Technology: Sputtering of Compound Materials
- Author
- Kiyotaka Wasa, Makoto Haber, Hideaki Adachi
- Publisher
- William Andrew
- Language
- English
- Year
- 2005
- Page
- 533
- ISBN
- 9780815514831,9783540211181,0815514832,3540211187,9780815519317
- File Type
- pdf
- File Size
- 6.0 MiB
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