Scanning Probe Lithography
- Author
- Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2001
- Page
- 197
- ISBN
- 978-1-4419-4894-6,978-1-4757-3331-0
- File Type
- pdf
- File Size
- 8.2 MiB
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