Fundamental Aspects of Silicon Oxidation
- Author
- Leonard C. Feldman (auth.), Yves J. Chabal (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2001
- Page
- 262
- ISBN
- 978-3-642-62583-1,978-3-642-56711-7
- File Type
- pdf
- File Size
- 11.7 MiB
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