Handbook of Advanced Plasma Processing Techniques
- Author
- J. W. Coburn (auth.), Dr. Randy J. Shul, Professor Stephen J. Pearton (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2000
- Page
- 655
- ISBN
- 978-3-642-63096-5,978-3-642-56989-0
- File Type
- pdf
- File Size
- 21.8 MiB
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