Mechanical Microsensors

Author: Professor Dr. Miko Elwenspoek, Dr. Remco Wiegerink (auth.)
Publisher: Springer-Verlag Berlin Heidelberg
Language: English
Edition: 1
Year: 2001
Page: 295
ISBN: 978-3-642-08706-6,978-3-662-04321-9
File Type: pdf
File Size: 10.0 MiB

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