Silicon science and advanced micro-device engineering II : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan

Author
Osamu HanaizumiMasafumi UnnoKenta Miura
Publisher
Trans Tech Publications
Language
English
Year
2012
Page
311 p. : ill. (some col.)
ISBN
9783038136828,3038136824
File Type
pdf
File Size
28.4 MiB

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