Silicon science and advanced micro-device engineering II : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan
- Author
- Osamu HanaizumiMasafumi UnnoKenta Miura
- Publisher
- Trans Tech Publications
- Language
- English
- Year
- 2012
- Page
- 311 p. : ill. (some col.)
- ISBN
- 9783038136828,3038136824
- File Type
- pdf
- File Size
- 28.4 MiB
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