Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
- Author
- Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
- Publisher
- Wiley-VCH
- Language
- English
- Edition
- 1
- Year
- 2014
- Page
- 529
- ISBN
- 3527335005,9783527335008
- File Type
- pdf
- File Size
- 19.9 MiB
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