Ultra clean processing of semiconductor surfaces IX (UCPSS 2008) : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008
- Author
- Paul MertensMarc MeurisMarc Heyns
- Publisher
- Trans Tech
- Language
- English
- Year
- 2009
- Page
- 396 pages : illustrations (some color)
- ISBN
- 9783038132820,3038132829
- File Type
- pdf
- File Size
- 80.6 MiB
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