Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
- Author
- Marc HeynsPaul MertensMarc Meuris
- Publisher
- Trans Tech Publications Ltd
- Language
- English
- Year
- 2013
- Page
- 328 pages : illustrations (black and white
- ISBN
- 9783038139089,3038139084,9781628700268,1628700262
- File Type
- pdf
- File Size
- 63.5 MiB
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