NEMS/MEMS Technology and Devices
- Author
- Khine, LynnTsai, Julius M. (Eds.)
- Publisher
- Trans Tech Publications Ltd
- Year
- 2011
- Page
- 242
- ISBN
- 978-1-62198-704-8,978-0-85404-149-7
- File Type
- pdf
- File Size
- 40.3 MiB
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