Scaling Issues and Design of MEMS
- Author
- Salvatore Baglio, Salvatore Castorina, Nicolo Savalli(auth.)
- Language
- English
- Year
- 2008
- Page
- 237
- ISBN
- 9780470016992,9780470034071
- File Type
- pdf
- File Size
- 9.7 MiB
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