Resonant MEMS: Principles, Modeling, Implementation, and Applications
- Author
- Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Jan G. Korvink, Osamu Tabata
- Publisher
- Wiley-VCH
- Language
- English
- Edition
- 1
- Year
- 2015
- Page
- 512
- ISBN
- 3527335455,9783527335459
- File Type
- pdf
- File Size
- 7.0 MiB
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