Three-Dimensional Integration of Semiconductors: Processing, Materials, and Applications
- Author
- Kazuo Kondo, Morihiro Kada, Kenji Takahashi (eds.)
- Publisher
- Springer International Publishing
- Language
- English
- Edition
- 1
- Year
- 2015
- Page
- XIX, 408
- ISBN
- 978-3-319-18674-0,978-3-319-18675-7
- File Type
- pdf
- File Size
- 43.0 MiB
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