Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition
- Author
- Sergey Edward Lyshevski
- Publisher
- CRC Press
- Language
- English
- Edition
- 2
- Year
- 2005
- Page
- 744
- ISBN
- 0849328381,9780849328381
- File Type
- pdf
- File Size
- 12.9 MiB
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