Handbook of Silicon Based MEMS Materials and Technologies, Second Edition
- Author
- Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos
- Publisher
- William Andrew Publishing
- Language
- English
- Edition
- Second edition
- Year
- 2015
- Page
- 787
- ISBN
- 0323299652,978-0-323-29965-7,253-141-154-2,605-605-606-6
- File Type
- pdf
- File Size
- 51.0 MiB
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