Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD

Author
Angel Yanguas-Gil (auth.)
Publisher
Springer International Publishing
Language
English
Edition
1
Year
2017
Page
XI, 128
ISBN
978-3-319-24670-3, 978-3-319-24672-7
File Type
pdf
File Size
3.1 MiB

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