- Author
- Prof. Dr.-Ing. Ernst Obermeier (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2001
- Page
- CXVI, 1806
- ISBN
- 978-3-540-42150-4,978-3-642-59497-7
- File Type
- File Size
- 384.8 MiB
The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
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