Silicon wet bulk micromachining for mems
- Author
- Prem Pal, Kazuo Sato
- Publisher
- Pan Stanford Pub
- Language
- English
- Edition
- 1
- Year
- 2016
- Page
- 424
- ISBN
- 981461372X,978-981-4613-72-9,9789814613736,9814613738,978-1-315-36492-6
- File Type
- pdf
- File Size
- 13.9 MiB
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