Microscopy of semiconducting materials 2003 : proceedings of the Institute of Physics Conference [on Microscopy of Semiconducting Materials], Cambridge University, 31 March - 3 April 2003 ; MSM XIII

Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.