Radio-Frequency Capacitive Discharges
- Author
- Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko
- Publisher
- CRC Press
- Language
- English, Russian
- Edition
- 1
- Year
- 1995
- Page
- 304
- ISBN
- 0-8493-8644-6,9780849386442,9781351419963,135141996X
- File Type
- pdf
- File Size
- 30.7 MiB
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