Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
- Author
- María Ángela Pampillón Arce
- Publisher
- Springer International Publishing
- Language
- English
- Edition
- 1
- Year
- 2017
- Page
- XXIII, 164
- ISBN
- 978-3-319-66606-8, 978-3-319-66607-5
- File Type
- pdf
- File Size
- 5.0 MiB
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