- Author
- Glocker, David A.Shah, S. Ismat
- Publisher
- Institute of Physics Publishing;CRC Press
- Language
- English
- Edition
- 1
- Year
- 1998
- Page
- 384
- ISBN
- 0-7503-0529-0,978-1-315-89369-3,978-1-351-07279-3,9780750305297
- File Type
- File Size
- 10.0 MiB
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. The main work is regularly updated with new topics, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
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