Plasma deposited thin films
- Author
- Jansen, FrankMort, J
- Publisher
- CRC Press, Taylor & Francis Group
- Language
- English
- Year
- 2018
- ISBN
- 978-1-351-07581-7,1351075810,0-8493-5119-7,978-1-315-89671-7
- File Type
- pdf
- File Size
- 24.4 MiB
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