Catalytic Chemical Vapor Deposition Technology and Applications of Cat-CVD
- Author
- Gleason, Karen K.Matsumura, HidekiSchropp, Ruud E.IUmemoto, Hironobu
- Language
- English
- Edition
- 1. Auflage
- Year
- 2019
- Page
- 424
- ISBN
- 978-3-527-34523-6,978-3-527-81864-8,978-3-527-81866-2,978-3-527-81865-5,352734523X
- File Type
- pdf
- File Size
- 21.0 MiB
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