Atomic Layer Deposition for Semiconductors
- Author
- Yoo, Cha YoungSeong Hwang, Cheol
- Publisher
- Springer
- Language
- English
- Year
- 2014
- Page
- x, 263 pages) : illustrations (some color
- ISBN
- 9781461480532,9781461480549,1461480531,146148054X
- File Type
- pdf
- File Size
- 8.3 MiB
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