Microactuators, Microsensors and Micromechanisms: MAMM 2020
- Author
- Lena Zentner, Steffen Strehle
- Publisher
- Springer
- Language
- English
- Year
- 2020
- Page
- 149
- ISBN
- 9783030616519
- File Type
- pdf
- File Size
- 20.2 MiB
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